Recently, nanopatterning with Lithography has attracted significant research interest due to their potential for use in biosensors, anti-reflection films, anti-fingerprint films, solar cells, nanofluidic and microfluidic channels, and some functional optical films. The advantages of this simple process include low cost, high replication fidelity, and relatively high throughput and productivity. Papers in this thematic series will introduce and review the recent advances in the field of the nanopatterning with lithography, from the fabrication processes and techniques to manufactured functional devices and their novel applications.
Edited by: JaeJong Lee, Helmut Schift, and Sunggook Park