Si-rich Al2O3 films grown by RF magnetron sputtering: structural and photoluminescence properties versus annealing treatment
Silicon-rich Al2O3 films (Si x (Al2O3)1−x) were co-sputtered from two separate silicon and alumina targets onto a long silicon oxide substrate. The effects of different annealing...
Nanoscale Research Letters 2013 8:273
Published on: 7 June 2013