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Nanopatterning Lithography

Guest edited by Jae Jong Lee (Korea Institute of Machinery & Materials, Korea), Helmut Schift (Paul Scherrer Institut, Switzerland)
To fabricate nanoscale structures on different kinds of substrates, nanopatterning lithography technologies have been studied during the past decades. Especially, nanoimprint lithography (NIL) is a promising technology for producing two-dimensional or three dimensional structures with sub-10 nm half-pitch features. The advantages of this simple process include low cost, high replication fidelity, and relatively high throughput and productivity. Recently, nanoscale and micro-scale hybrid structures have attracted significant research interest due to their potential for use in biosensors, anti-reflection films, anti-fingerprint films, solar cells, nanofluidic and microfluidic channels, and some functional optical films. The nanopatterning lithography systems using roll-typed stamps have become increasingly appealing technologies for undertaking mass production and continuous fabrication of those hybrid patterns on large area substrates. Papers in this thematic series introduce and review the recent advances in the field of the nanopatterning lithography, from the fabrication processes and techniques to manufactured functional devices and their novel applications.


  1. Research

    Rapid and conformal coating of polymer resins by airbrushing for continuous and high-speed roll-to-roll nanopatterning: parametric quality controls and extended applications

    We present a facile and scalable coating method based on controlled airbrushing, which is suitable for conformal resin coating in continuous roll-to-roll (R2R) nanoimprint lithography (NIL) process. By control...

    Jae Hyuk Lee, Minho Na, Jiyeop Kim, Kangeun Yoo, Jaekyu Park, Jeong Dae Kim, Dong Kyo Oh, Seungjo Lee, Hongseok Youn, Moon Kyu Kwak and Jong G. Ok

    Nano Convergence 2017 4:11

    Published on: 1 May 2017

  2. Letters

    InGaN-based photoanode with ZnO nanowires for water splitting

    The water splitting properties of InGaN photoanodes equipped with ZnO nanowires were examined in this study. Over the solar spectrum range, the absorbance exhibited a remarkable increase due to the enhanced li...

    Junjie Kang, Vinhquang Dang, Hongjian Li, Sungjin Moon, Panpan Li, Yangdoo Kim, Chaehyun Kim, Hakjong Choi, Zhiqiang Liu and Heon Lee

    Nano Convergence 2016 3:34

    Published on: 14 December 2016