Dr Olena Fesenko, Prof Leonid Yatsenko
Structural and electrical properties of oxygen complexes in Cz and FZ silicon crystals implanted with carbon ions
We present a comparative study of thermal donor (TD) center formation mechanisms as a result of carbon ion implantation into float zone (FZ-Si) and Czochralski (Cz-Si) silicon crystals. The kinetics of the TD ...
Citation: Nanoscale Research Letters 2014 9:693